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1. (WO2018221636) INCLINATION ANGLE AMOUNT CALCULATION DEVICE, SAMPLE STAND, CHARGED PARTICLE BEAM DEVICE, AND PROGRAM

Pub. No.:    WO/2018/221636    International Application No.:    PCT/JP2018/020901
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Fri Jun 01 01:59:59 CEST 2018
IPC: H01J 37/20
G01N 23/2055
H01J 37/22
H01J 37/244
H01J 37/26
H01J 37/28
Applicants: NIPPON STEEL & SUMITOMO METAL CORPORATION
新日鐵住金株式会社
Inventors: MORI, Takashige
森 孝茂
AMINO, Takafumi
網野 岳文
MARUYAMA, Naoki
丸山 直紀
TANIYAMA, Akira
谷山 明
TANIGUCHI, Shunsuke
谷口 俊介
YOKOYAMA, Chie
横山 千恵
Title: INCLINATION ANGLE AMOUNT CALCULATION DEVICE, SAMPLE STAND, CHARGED PARTICLE BEAM DEVICE, AND PROGRAM
Abstract:
The present invention provides an inclination angle amount calculation device used in a charged particle beam device in which a charged particle beam is impinged on the surface of a sample mounted on a sample stand, the inclination angle amount calculation device calculating an inclination angle amount which is a command value for controlling the inclination direction and the inclination amount of the sample and/or the charged particle beam and which is necessary for changing the impingement direction of the charged particle beam with respect to the sample, the inclination angle amount calculation device comprising an inclination angle amount calculation unit for calculating the inclination angle amount on the basis of information indicating the impingement direction of the charged particle beam with respect to a crystal specified on a crystal orientation diagram which is a diagram expressing the impingement direction of the charged particle beam with respect to a crystal coordinate system of the crystal of a selected position of the surface, in a state in which the impingement direction of the charged particle beam with respect to the sample is a prescribed impingement direction.