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1. (WO2018221436) SAMPLE HOLDER
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Pub. No.: WO/2018/221436 International Application No.: PCT/JP2018/020286
Publication Date: 06.12.2018 International Filing Date: 28.05.2018
H01L 21/683 (2006.01) ,H05B 3/20 (2006.01)
[IPC code unknown for H01L 21/683][IPC code unknown for H05B 3/20]
京セラ株式会社 KYOCERA CORPORATION [JP/JP]; 京都府京都市伏見区竹田鳥羽殿町6番地 6, Takeda Tobadono-cho, Fushimi-ku, Kyoto-shi, Kyoto 6128501, JP
赤羽 賢一 AKABANE, Kenichi; JP
Priority Data:
(JA) 試料保持具
(EN) A sample holder 10 according to the present disclosure is provided with: a ceramic body 1 which has a sample holding surface 11 on one main surface thereof; and a heating resistor 2 which is provided on the other main surface of the ceramic body 1. A plurality of grooves 3 are provided in a grid pattern on the surface of the heating resistor 2, and the directions in which the plurality of grooves 3 extend differ in each region of the heating resistor 2.
(FR) Un porte-échantillon 10 selon la présente invention comprend : un corps en céramique 1 qui a une surface de support d'échantillon 11 sur une surface principale de celui-ci; et une résistance chauffante 2 qui est disposée sur l'autre surface principale du corps en céramique 1. Une pluralité de rainures 3 sont disposées selon un motif de grille sur la surface de la résistance chauffante 2, et les directions dans lesquelles la pluralité de rainures 3 s'étendent diffèrent dans chaque région de la résistance chauffante 2.
(JA) 本開示の試料保持具10は、一方の主面に試料保持面11を有するセラミック体1と、該セラミック体1の他方の主面に設けられた発熱抵抗体2とを備えており、該発熱抵抗体2の表面には格子状に複数の溝3が設けられているとともに、該複数の溝3の伸びる方向が前記発熱抵抗体2の部位ごとに異なる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)