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1. (WO2018221412) SUBSTRATE-ACCOMMODATING CONTAINER
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Pub. No.: WO/2018/221412 International Application No.: PCT/JP2018/020167
Publication Date: 06.12.2018 International Filing Date: 25.05.2018
IPC:
H01L 21/673 (2006.01) ,B65D 85/30 (2006.01) ,F16J 15/10 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
67
Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components
673
using specially adapted carriers
B PERFORMING OPERATIONS; TRANSPORTING
65
CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
D
CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
85
Containers, packaging elements or packages, specially adapted for particular articles or materials
30
for articles particularly sensitive to damage by shock or pressure
F MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
16
ENGINEERING ELEMENTS OR UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
J
PISTONS; CYLINDERS; PRESSURE VESSELS IN GENERAL; SEALINGS
15
Sealings
02
between relatively-stationary surfaces
06
with solid packing compressed between sealing surfaces
10
with non-metallic packing
Applicants:
信越ポリマー株式会社 SHIN-ETSU POLYMER CO.,LTD. [JP/JP]; 東京都千代田区神田須田町一丁目9番地 9, Kandasuda-cho 1chome, Chiyoda-ku Tokyo 1010041, JP
Inventors:
小川 統 OGAWA Osamu; JP
Agent:
坂本 智弘 SAKAMOTO Tomohiro; JP
Priority Data:
2017-10887901.06.2017JP
Title (EN) SUBSTRATE-ACCOMMODATING CONTAINER
(FR) RÉCIPIENT DE RÉCEPTION DE SUBSTRAT
(JA) 基板収納容器
Abstract:
(EN) The present invention is a substrate-accommodating container (1) comprising an annular packing (30) provided between a container body (10) for accommodating a substrate and a lid body (20). In the container body (10), a sealing surface (12) contacted by the packing (30) is formed. In the lid body (20), an attachment groove (21) for attaching the packing (30) is formed. The packing (30) is formed from a body part (31) that is fitted in the attachment groove (21), and an extension piece (32) that extends from the body part (31). The extension piece (32) has a protruding part (320) that protrudes to the lid-body (20) side in a closing direction (H) of the lid body (20), and a seal part (321) positioned further toward the distal end than is the protruding part (320). The seal part (321) is inverted at the sealing-surface (12) side and the body-part (31) side, and contacts the sealing surface (12). This makes it possible to provide a substrate-accommodating container in which the sealing properties with respect to the internal positive pressure are improved.
(FR) La présente invention concerne un récipient de réception de substrat (1) comprenant une garniture annulaire (30) disposée entre un corps de récipient (10) pour recevoir un substrat et un corps de couvercle (20). Dans le corps de récipient (10), une surface d'étanchéité (12) mise en contact par la garniture (30) est formée. Dans le corps de couvercle (20), une rainure de fixation (21) pour fixer la garniture (30) est formée. La garniture (30) est formée à partir d'une partie de corps (31) qui est ajustée dans la rainure de fixation (21), et d'une pièce d'extension (32) qui s'étend à partir de la partie de corps (31). La pièce d'extension (32) a une partie en saillie (320) qui fait saillie vers le côté corps de couvercle (20) dans une direction de fermeture (H) du corps de couvercle (20), et une partie d'étanchéité (321) positionnée davantage vers l'extrémité distale que la partie en saillie (320). La partie d'étanchéité (321) est inversée au niveau du côté de la surface d'étanchéité (12) et du côté de la partie corps (31), et vient en contact avec la surface d'étanchéité (12). Cela permet d'obtenir un récipient de réception de substrat dans lequel les propriétés d'étanchéité par rapport à la pression positive interne sont améliorées.
(JA) 本発明は、基板を収納する容器本体(10)と蓋体(20)との間に設けられる環状のパッキン(30)を備える基板収納容器(1)であって、容器本体(10)は、パッキン(30)が接触するシール面(12)が形成され、蓋体(20)は、パッキン(30)を取り付ける取付溝(21)が形成され、パッキン(30)は、取付溝(21)に嵌められる本体部(31)と、本体部(31)から延出された延出片(32)と、で形成されており、延出片(32)は、蓋体(20)の閉止方向(H)において蓋体(20)側に突出する突起部(320)と、突起部(320)よりも先端に位置するシール部(321)と、を有し、シール部(321)は、シール面(12)側かつ本体部(31)側に反転して、シール面(12)に接触するものである。これにより、内部の陽圧に対するシール性を向上させた基板収納容器を提供することができる。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Japanese (JA)
Filing Language: Japanese (JA)