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1. (WO2018221304) NANOBUBBLE-CONTAINING INORGANIC OXIDE FINE PARTICLES, AND POLISHING AGENT INCLUDING SAME

Pub. No.:    WO/2018/221304    International Application No.:    PCT/JP2018/019548
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Tue May 22 01:59:59 CEST 2018
IPC: C09K 3/14
B24B 37/00
H01L 21/304
Applicants: JGC CATALYSTS AND CHEMICALS LTD.
日揮触媒化成株式会社
Inventors: KOMATSU, Michio
小松 通郎
NISHIDA, Hiroyasu
西田 広泰
NAKAYAMA, Kazuhiro
中山 和洋
Title: NANOBUBBLE-CONTAINING INORGANIC OXIDE FINE PARTICLES, AND POLISHING AGENT INCLUDING SAME
Abstract:
The present invention addresses the problem of providing a nanobubble-containing inorganic oxide fine particle dispersion exhibiting excellent concentration stability in the process of being used as a polishing agent. The present invention solves the abovementioned problem by providing a nanobubble-containing inorganic oxide fine particle dispersion which includes: inorganic oxide fine particles which have an average particle size of 1-500 nm, and which include Ce-containing fine particles; and nanobubbles which have an average bubble size of 50-500 nm, and which comprise at least one non-oxidizing gas selected from the group consisting of N2 and H2.