Search International and National Patent Collections
|1. (WO2018221304) NANOBUBBLE-CONTAINING INORGANIC OXIDE FINE PARTICLES, AND POLISHING AGENT INCLUDING SAME|
|Applicants:||JGC CATALYSTS AND CHEMICALS LTD.
|Title:||NANOBUBBLE-CONTAINING INORGANIC OXIDE FINE PARTICLES, AND POLISHING AGENT INCLUDING SAME|
The present invention addresses the problem of providing a nanobubble-containing inorganic oxide fine particle dispersion exhibiting excellent concentration stability in the process of being used as a polishing agent. The present invention solves the abovementioned problem by providing a nanobubble-containing inorganic oxide fine particle dispersion which includes: inorganic oxide fine particles which have an average particle size of 1-500 nm, and which include Ce-containing fine particles; and nanobubbles which have an average bubble size of 50-500 nm, and which comprise at least one non-oxidizing gas selected from the group consisting of N2 and H2.