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1. (WO2018221290) GETTERING LAYER FORMING DEVICE, GETTERING LAYER FORMING METHOD, AND COMPUTER STORAGE MEDIUM

Pub. No.:    WO/2018/221290    International Application No.:    PCT/JP2018/019481
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Tue May 22 01:59:59 CEST 2018
IPC: H01L 21/322
H01L 21/304
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: FUKUOKA, Tetsuo
福岡 哲夫
Title: GETTERING LAYER FORMING DEVICE, GETTERING LAYER FORMING METHOD, AND COMPUTER STORAGE MEDIUM
Abstract:
A gettering layer forming device for forming a gettering layer on a substrate has: a substrate holding part that holds the substrate; a lapping film that contacts the substrate held in the substrate holding part and polishes said substrate; a base that supports the lapping film, and is capable of moving in the vertical direction and rotating; and a water supply unit that supplies water to the substrate held in the substrate holding part.