Search International and National Patent Collections

1. (WO2018221248) PLASMA TREATMENT DEVICE AND METHOD FOR MANUFACTURING SURFACE TREATED FILM

Pub. No.:    WO/2018/221248    International Application No.:    PCT/JP2018/019129
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Fri May 18 01:59:59 CEST 2018
IPC: H05H 1/24
Applicants: ZEON CORPORATION
日本ゼオン株式会社
Inventors: HIRANO, Masaya
平野 祐哉
Title: PLASMA TREATMENT DEVICE AND METHOD FOR MANUFACTURING SURFACE TREATED FILM
Abstract:
Provided is a plasma treatment device comprising: a plasma treatment unit capable of subjecting a film to a plasma treatment; and an inversion unit capable of inverting a film that has been delivered from the plasma treatment unit and returning the film to the plasma treatment unit. The plasma treatment unit is comprises: a cooling roller having a peripheral surface that can be contacted by the film delivered to the inversion unit and the film returned from the inversion unit, said cooling roller being provided such that the temperature can be adjusted; and a plurality of electrodes provided facing the peripheral surface of the cooling roller. The plurality of electrodes include a first electrode and a second electrode. The first electrode is provided so that the film being delivered to the inversion unit is conveyed so as to pass between the first electrode and the cooling roller while the film contacts the peripheral surface of the cooling roller, and the second electrode is provided so that the film returned from the inversion unit is conveyed so as to pass between the second electrode and the cooling roller while the film contacts the peripheral surface of the cooling roller.