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|1. (WO2018221115) EXPOSURE DEVICE AND SUBSTRATE PROCESSING DEVICE|
|Applicants:||SCREEN HOLDINGS CO., LTD.
|Title:||EXPOSURE DEVICE AND SUBSTRATE PROCESSING DEVICE|
An exposure device comprises: a processing chamber that accommodates a substrate; a light source unit provided so as to be able to irradiate vacuum UV rays downward into the processing chamber; a mounting part on which the substrate is mounted inside the processing chamber and below the light source unit; and a raising/lowering unit that raises and lowers the mounting part. The raising/lowering unit raises and lowers the mounting part so that the mounting part is in a first position when the substrate is conveyed into the processing chamber and the substrate is conveyed out of the processing chamber, and the mounting part is in a second position, which is above the first position, when the substrate is irradiated with vacuum UV rays by the light source unit. The raising/lowering unit includes: a plurality of support shafts that support the mounting part; a connecting member that connects the plurality of support shafts to each other; a raising/lowering drive mechanism that raises and lowers the connecting member; a vertically extending guide member; and a movement unit that is provided to the connecting member to enable movement in the vertical direction along the guide member.