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1. (WO2018221115) EXPOSURE DEVICE AND SUBSTRATE PROCESSING DEVICE

Pub. No.:    WO/2018/221115    International Application No.:    PCT/JP2018/017408
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Wed May 02 01:59:59 CEST 2018
IPC: G03F 7/20
H01L 21/027
H01L 21/677
Applicants: SCREEN HOLDINGS CO., LTD.
株式会社SCREENホールディングス
Inventors: FUKUMOTO, Yasuhiro
福本 靖博
OKI, Takafumi
大木 孝文
MATSUO, Tomohiro
松尾 友宏
ASAI, Masaya
浅井 正也
HARUMOTO, Masahiko
春本 将彦
TANAKA, Yuji
田中 裕二
NAKAYAMA, Chisayo
中山 知佐世
Title: EXPOSURE DEVICE AND SUBSTRATE PROCESSING DEVICE
Abstract:
An exposure device comprises: a processing chamber that accommodates a substrate; a light source unit provided so as to be able to irradiate vacuum UV rays downward into the processing chamber; a mounting part on which the substrate is mounted inside the processing chamber and below the light source unit; and a raising/lowering unit that raises and lowers the mounting part. The raising/lowering unit raises and lowers the mounting part so that the mounting part is in a first position when the substrate is conveyed into the processing chamber and the substrate is conveyed out of the processing chamber, and the mounting part is in a second position, which is above the first position, when the substrate is irradiated with vacuum UV rays by the light source unit. The raising/lowering unit includes: a plurality of support shafts that support the mounting part; a connecting member that connects the plurality of support shafts to each other; a raising/lowering drive mechanism that raises and lowers the connecting member; a vertically extending guide member; and a movement unit that is provided to the connecting member to enable movement in the vertical direction along the guide member.