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1. (WO2018220447) IMPROVED PROCESS FOR MANUFACTURING A CRYSTALLINE METAMATERIAL WITHIN A SILICON LIGHT-TO-ELECTRICITY CONVERTER

Pub. No.:    WO/2018/220447    International Application No.:    PCT/IB2018/000914
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Fri May 25 01:59:59 CEST 2018
IPC: H01L 31/068
H01L 31/20
H01L 31/0352
H01L 31/0384
H01L 31/18
H01L 31/0376
H01L 21/265
Applicants: SEGTON ADVANCED TECHNOLOGIE SAS
Inventors: KUZNICKI, Zbigniew
Title: IMPROVED PROCESS FOR MANUFACTURING A CRYSTALLINE METAMATERIAL WITHIN A SILICON LIGHT-TO-ELECTRICITY CONVERTER
Abstract:
The invention provides a solution through wide-beam, wide-spot, well-controlled ion- amorphization, which causes almost unidirectional crystal lattice agitations and minimizes lateral and multidirectional lattice vibrations at the origin of hard extended structural defects. The crystal lattice is not too deformed during the ion implantation shock remaining within technically acceptable limits. This is particularly useful in the case of devices with a large active surface area as light-to-electricity converters. The crystal damage and the energy expenditure of the post-implantation thermal treatment are significantly reduced opening the way to costly controlled industrial applications. This invention is preferably applicable in the field of new generation, high efficiency all-silicon light-to-electricity converters.