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1. (WO2018220345) MEMS DEVICES AND PROCESSES
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Pub. No.: WO/2018/220345 International Application No.: PCT/GB2018/051388
Publication Date: 06.12.2018 International Filing Date: 22.05.2018
IPC:
H04R 19/00 (2006.01) ,B81B 3/00 (2006.01) ,H04R 19/04 (2006.01)
[IPC code unknown for H04R 19][IPC code unknown for B81B 3][IPC code unknown for H04R 19/04]
Applicants:
CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LIMITED [GB/GB]; 7B Nightingale Way, Quartermile Edinburgh Lothian EH3 9EG, GB
Inventors:
HOEKSTRA, Tsjerk Hans; GB
Agent:
COOPER-ROLFE, Elizabeth; GB
Priority Data:
1709741.119.06.2017GB
62/512,89431.05.2017US
Title (EN) MEMS DEVICES AND PROCESSES
(FR) DISPOSITIFS MEMS ET PROCÉDÉS
Abstract:
(EN) The application describes MEMS transducers having a patterned membrane electrode which incorporates a plurality of openings or voids. At least a portion of the peripheral edge of the opening is provided with a plurality of discontinuities e.g. projections and recesses which extend within the plane of the membrane electrode.
(FR) L'invention concerne des transducteurs MEMS ayant une électrode à membrane à motifs qui incorpore une pluralité d'ouvertures ou de vides. Au moins une partie du bord périphérique de l'ouverture est pourvue d'une pluralité de discontinuités, par exemple des saillies et des évidements, qui s'étendent à l'intérieur du plan de l'électrode à membrane.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)