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1. (WO2018220344) MEMS DEVICES AND PROCESSES

Pub. No.:    WO/2018/220344    International Application No.:    PCT/GB2018/051387
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Wed May 23 01:59:59 CEST 2018
IPC: H04R 19/00
H04R 19/04
B81B 3/00
Applicants: CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LIMITED
Inventors: PIECHOCINSKI, Marek Sebastian
LAMING, Richard Ian
HOEKSTRA, Tsjerk Hans
JENKINS, Colin Robert
THOMSEN, Axel
Title: MEMS DEVICES AND PROCESSES
Abstract:
The application describes MEMS transducers having a patterned membrane electrode which incorporates a plurality of openings or voids. A conductive element is provided on the surface of the underlying membrane within the opening.