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1. (WO2018220272) METHOD OF MANUFACTURING A MASTER PLATE AND A MASTER PLATE

Pub. No.:    WO/2018/220272    International Application No.:    PCT/FI2018/050384
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Wed May 23 01:59:59 CEST 2018
IPC: G02B 5/18
G03F 7/00
G02B 27/44
B29D 11/00
G02B 27/00
G02B 27/01
Applicants: DISPELIX OY
Inventors: RAHOMÄKI, Jussi
ERDMANIS, Mikhail
VARTIAINEN, Ismo
Title: METHOD OF MANUFACTURING A MASTER PLATE AND A MASTER PLATE
Abstract:
The invention concerns a method of manufacturing a master plate for fabrication of diffractive structures, and a corresponding master plate. The method comprises providing a substrate (10) comprising a stack (12) of selective etch layers (12A-C, 14A-C) and providing an etch mask layer (16) on the substrate (10). Further, the method comprises etching the substrate (10) in a multi-step etching process by exposing the substrate (10) piecewise at different mask zones (S1 -S5) of the mask layer (16) and using said selective etch layers (12A-C, 14A-C) to produce to the substrate (10) a height- modulated surface profile defined by the mask zones in lateral dimensions and by said stack (12) in height dimension of the substrate (10), and, finally, providing a height-modulated master grating (18') onto the surface profile, the height modulation of the master grating (18') being at least partly defined by said surface profile of the substrate (10).