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1. (WO2018220271) METHOD OF MANUFACTURING A HEIGHT-MODULATED OPTICAL DIFFRACTIVE GRATING

Pub. No.:    WO/2018/220271    International Application No.:    PCT/FI2018/050383
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Wed May 23 01:59:59 CEST 2018
IPC: G02B 5/18
G02B 6/00
G02B 26/08
G02B 27/09
C23C 16/01
C23C 16/04
H01L 21/02
Applicants: DISPELIX OY
Inventors: VARTIAINEN, Ismo
RAHOMÄKI, Jussi
ERDMANIS, Mikhail
Title: METHOD OF MANUFACTURING A HEIGHT-MODULATED OPTICAL DIFFRACTIVE GRATING
Abstract:
The invention concerns a method of manufacturing a height-modulated optically diffractive grating. The method comprises providing a substrate and manufacturing a plurality of temporary elements of first material onto the substrate, the elements being separated by gaps and arranged as a periodic structure comprising at least two periods having different element heights. A coating layer of second material is deposited on the plurality of temporary elements such that the coating layer fills said gaps and covers said temporary elements. Then, a uniform layer of the second material is removed in order to expose said temporary elements and the first material is removed in order to form a height -modulated pattern of the second material onto the substrate as the optically diffractive grating. The invention relaxes manufacturing constraints when manufacturing gratings with locally varying diffraction efficiency.