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1. (WO2018220269) METHOD OF MANUFACTURING A VARIABLE EFFICIENCY DIFFRACTIVE GRATING AND A DIFFRACTIVE GRATING

Pub. No.:    WO/2018/220269    International Application No.:    PCT/FI2018/050378
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Sat May 19 01:59:59 CEST 2018
IPC: G02B 5/18
G02B 6/00
G02B 26/08
G02B 27/09
C23C 16/01
C23C 16/04
H01L 21/02
Applicants: DISPELIX OY
Inventors: RAHOMÄKI, Jussi
VARTIAINEN, Ismo
Title: METHOD OF MANUFACTURING A VARIABLE EFFICIENCY DIFFRACTIVE GRATING AND A DIFFRACTIVE GRATING
Abstract:
The invention concerns a method of manufacturing a modulated optically diffractive grating and a corresponding grating. The method comprises providing a substrate and manufacturing a plurality of temporary elements onto the substrate, the temporary elements being arranged in a periodic pattern comprising at least two periods having different element characteristics. Next, a first deposition layer is deposited so as to at least partially cover the temporary elements with the first deposition layer and the temporary elements are removed from the substrate in order to form onto the substrate a modulated diffractive grating of first grating elements made of the first deposition layer, the pattern comprising within each period a plurality of first grating elements and one more gaps between the first grating elements.The invention allows for producing high-quality gratings with locally varying diffraction efficiency.