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1. (WO2018220264) METHOD OF MANUFACTURING A DIFFRACTIVE GRATING

Pub. No.:    WO/2018/220264    International Application No.:    PCT/FI2018/050369
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Sat May 19 01:59:59 CEST 2018
IPC: G02B 5/18
G02B 6/00
G02B 26/08
G02B 27/09
C23C 16/01
C23C 16/04
H01L 21/02
Applicants: DISPELIX OY
Inventors: OLKKONEN, Juuso
VARTIAINEN, Ismo
RAHOMÄKI, Jussi
Title: METHOD OF MANUFACTURING A DIFFRACTIVE GRATING
Abstract:
The invention relates to a method of manufacturing a diffractive grating. The method comprises providing a first substrate and manufacturing onto the first substrate a first surface profile using temporary grating material. Next, the first surface profile is covered entirely by a layer of final grating material and a second substrate is bonded onto the final grating material. Finally, the first substrate and the temporary grating material are removed for producing on the final grating material a second surface profile,which is a negative of the first surface profile.The invention allows for conveniently producing high quality gratings using e.g. inorganic materials and height and/or fill factor modulation for diffraction efficiency control.