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|1. (WO2018220264) METHOD OF MANUFACTURING A DIFFRACTIVE GRATING|
|Title:||METHOD OF MANUFACTURING A DIFFRACTIVE GRATING|
The invention relates to a method of manufacturing a diffractive grating. The method comprises providing a first substrate and manufacturing onto the first substrate a first surface profile using temporary grating material. Next, the first surface profile is covered entirely by a layer of final grating material and a second substrate is bonded onto the final grating material. Finally, the first substrate and the temporary grating material are removed for producing on the final grating material a second surface profile,which is a negative of the first surface profile.The invention allows for conveniently producing high quality gratings using e.g. inorganic materials and height and/or fill factor modulation for diffraction efficiency control.