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1. (WO2018219580) GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD

Pub. No.:    WO/2018/219580    International Application No.:    PCT/EP2018/061264
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Fri May 04 01:59:59 CEST 2018
IPC: C23C 16/448
Applicants: MEYER BURGER (GERMANY) AG
Inventors: LÖWEL, Oliver
FRÖHNER, Marco
BÖDDICKER, Alexander
Title: GAS SUPPLY SYSTEM AND GAS SUPPLY METHOD
Abstract:
The invention relates to a gas supply system with a mass flow controller for liquids, liquid lines, an evaporator for converting a fluid from the liquid state to the gaseous state particularly under subatmospheric pressure, gas lines, a mixing device for mixing the fluid with a carrier gas, and a corresponding gas supply method. The aim of the invention is to provide a gas supply system that allows long operating times between maintenance work and low maintenance costs. To this end, the gas supply system comprises, in the fluid flow direction, first the mass flow controller, then a first heatable gas line, then an evaporator and the mixing device.