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1. (WO2018219575) METHOD FOR ANALYZING A GAS BY MASS SPECTROMETRY, AND MASS SPECTROMETER

Pub. No.:    WO/2018/219575    International Application No.:    PCT/EP2018/061159
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Thu May 03 01:59:59 CEST 2018
IPC: H01J 49/00
H01J 49/42
Applicants: CARL ZEISS SMT GMBH
Inventors: ALIMAN, Michel
LAUE, Alexander
SCHUETZ, Andreas
REUTER, Rüdiger
Title: METHOD FOR ANALYZING A GAS BY MASS SPECTROMETRY, AND MASS SPECTROMETER
Abstract:
The invention relates to a method for analyzing a gas by mass spectrometry, comprising the following steps: exciting ions of the gas to be analyzed in an FT ion trap, recording a first frequency spectrum (FS1) in a first measurement time interval (FFT1) during or after the excitation of the ions, wherein the first frequency spectrum (FS1) contains ion frequencies (fi) of the excited ions and interfering frequencies (fn), and recording a second frequency spectrum (FS2) in a second measurement time interval (FFT2), wherein the second frequency spectrum (FS2) contains the interfering frequencies (fn), but not the ion frequencies (fj) of the first frequency spectrum (FS1), and comparing the first frequency spectrum (FS1) with the second frequency spectrum (FS2) in order to identify the interfering frequencies (fn) in the first frequency spectrum (FS1). The invention also relates to a mass spectrometer which is suitable for carrying out the method for analyzing the gas by mass spectrometry.