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1. (WO2018219424) METHOD AND APPARATUS FOR USE IN SUBSTRATE PROCESSING

Pub. No.:    WO/2018/219424    International Application No.:    PCT/EP2017/062906
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Tue May 30 01:59:59 CEST 2017
IPC: H01L 21/677
Applicants: APPLIED MATERIALS ITALIA S.R.L.
Inventors: RUFFO, Alberto Emilio
Title: METHOD AND APPARATUS FOR USE IN SUBSTRATE PROCESSING
Abstract:
According to an aspect of the present disclosure, a method for processing substrates is provided that includes providing a substrate loading stack arrangement including a multitude of substrates, unloading the multitude of substrates from the substrate loading stack arrangement at a first rate, and filling a substrate buffer with substrates from the substrate loading stack arrangement with a first part of the multitude of substrates at a second rate, wherein the second rate is smaller than the first rate. Further, an apparatus for processing substrates is provided that includes a reception for arranging a substrate loading stack arrangement; at least one transport device for transporting a multitude of substrates from the substrate loading stack arrangement to a substrate buffer; and a controller configured for controlling the substrate loading stack arrangement to unload the multitude of substrates from the substrate loading stack arrangement at a first rate, and for controll ing the substrate buffer to load a first part of the multitude of substrates into the substrate buffer at a second rate, wherein the second rate is smaller than the first rate.