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1. (WO2018219302) HANDLING APPARATUS AND HANDLING METHOD THEREFOR

Pub. No.:    WO/2018/219302    International Application No.:    PCT/CN2018/089071
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Thu May 31 01:59:59 CEST 2018
IPC: H01L 21/677
Applicants: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
上海微电子装备(集团)股份有限公司
Inventors: ZHANG, Yudi
张玉地
ZHEN, Jing
甄静
Title: HANDLING APPARATUS AND HANDLING METHOD THEREFOR
Abstract:
Provided in the present invention are a handling apparatus and a handling method therefor. The handling apparatus comprises a movable transport mechanism; a supporting mesa having one supporting surface parallel to the horizon and used for supporting objects to be handled, the supporting surface having defined thereon multiple supporting work positions in the circumferential direction, the supporting work positions being used for placing the objects to be handled, and the supporting mesa being provided at the center thereof with a through hole; a grabbing mechanism used for grabbing and placing the objects to be handled, the grabbing mechanism running through the through hole to be connected to the transport mechanism; and a driver mechanism used for driving the supporting mesa to rotate horizontally on the transport mechanism. The handling apparatus and the handling method therefor provided in the present invention allow the grabbing mechanism to have a same trajectory each time when grabbing the object to be handled on the supporting work position of a target grabbing/placement area, thus increasing the handling efficiency of the handling apparatus.