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1. (WO2018219217) SHIFTING-IN/OUT MECHANISM, AND SHIFTING-IN/OUT DEVICE USED FOR WORKPIECE TABLE OF PHOTOETCHING MACHINE

Pub. No.:    WO/2018/219217    International Application No.:    PCT/CN2018/088335
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Sat May 26 01:59:59 CEST 2018
IPC: G03F 7/20
H01L 21/677
Applicants: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
上海微电子装备(集团)股份有限公司
Inventors: CONG, Guodong
丛国栋
LI, Zhilong
李志龙
HUANG, Yaqing
黄亚庆
ZHAO, Wenbo
赵文波
Title: SHIFTING-IN/OUT MECHANISM, AND SHIFTING-IN/OUT DEVICE USED FOR WORKPIECE TABLE OF PHOTOETCHING MACHINE
Abstract:
Disclosed is a shifting-in/out mechanism (10), comprising a connecting block (2), a plate spring (3), a plate spring deformation driving unit (4) and a roller unit (5); the plate spring has a two-segment structure, the two segments of the plate spring being connected by means of a hinge (401), and the plate spring having one segment thereof mounted on an object (1) to be moved by means of the connecting block and the other segment thereof connected to the roller unit; the plate spring deformation driving unit applies a driving force to the segment, connected to the roller unit, of the plate spring for deformation towards a movement bearing surface. Further disclosed is a shifting-in/out device used for a workpiece table of a photoetching machine. The shifting-in/out device comprises a bottom frame (7), an air spring (8), an air cushion device (9) and shifting-in/out mechanisms. A plurality of sets of shifting-in/out mechanisms are provided at a lower surface or a side of the bottom frame. The plate spring of the shifting-in/out mechanism is segmented by a hinge structure, and the force bearing points of the deformed plate spring are collinear, thereby ensuring a uniform force and preventing jamming; the shifting-in/out device uses a plurality of sets of shifting-in/out mechanisms in pairs, thereby preventing the workpiece table from overturning due to an excessive pressure applied on the ground.