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1. (WO2018219153) PEROVSKITE THIN FILM POST-TREATMENT APPARATUS, USING METHOD, AND APPLICATION

Pub. No.:    WO/2018/219153    International Application No.:    PCT/CN2018/087354
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Fri May 18 01:59:59 CEST 2018
IPC: H01L 51/42
Applicants: HANGZHOU MICROQUANTA SEMICONDUCTOR CORPORATION LIMITED
杭州纤纳光电科技有限公司
Inventors: YAO, Jizhong
姚冀众
YAN, Buyi
颜步一
Title: PEROVSKITE THIN FILM POST-TREATMENT APPARATUS, USING METHOD, AND APPLICATION
Abstract:
The present invention relates to a perovskite thin film post-treatment apparatus, comprising a solution spray coating and cleaning part and/or a solvent deposition part. The solution spray coating and cleaning part comprises a first conveying device, a first closed chamber, a solution spray coating device, a high pressure gas nozzle device, and a high temperature drying device; the high pressure gas nozzle device is disposed between the solution spray coating device and the high temperature drying device; the first conveying device stretches across the first closed chamber. The solvent deposition part comprises a drive shaft device, a second closed chamber, a heating device, and a solvent evaporation device; the solvent evaporation device is close to the solution spray coating and cleaning part; a drive shaft of the drive shaft device passes between the heating device and the solvent evaporation device which are disposed in a vertical direction. The present invention also relates to a using method for and an application of a perovskite thin film post-treatment apparatus. The present invention is used for performing subsequent cleaning and annealing on a substrate on which a perovskite thin film is manufactured, and repairing defects of the perovskite thin film, thereby further improving the quality of the perovskite thin film.