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1. (WO2018219002) MEMS GROUND ATMOSPHERIC ELECTRIC FIELD SENSOR

Pub. No.:    WO/2018/219002    International Application No.:    PCT/CN2018/077780
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Fri Mar 02 00:59:59 CET 2018
IPC: G01R 29/12
Applicants: BEIJING TFLYING TRANSDUCER TECHNOLOGY CO., LTD.
北京中科飞龙传感技术有限责任公司
Inventors: YANG, Pengfei
杨鹏飞
PENG, Chunrong
彭春荣
XIA, Shanhong
夏善红
LIU, Yutao
刘宇涛
WU, Shuang
吴双
Title: MEMS GROUND ATMOSPHERIC ELECTRIC FIELD SENSOR
Abstract:
A MEMS ground atmospheric electric field sensor, comprising: a curved-top probe structure (1) and a MEMS electric field measuring module (3), the curved-top probe structure (1) comprising: an electrically conductive curved-top rainproof housing (11), a top part being curved and a bottom part being provided with a groove facing the top part, and an electrically conductive connection post (12), provided at a top part of the groove and electrically connected to the curved-top rainproof housing (11); a fixed support cavity upper part (13), being a tube body having a closed top part and an open bottom part, disposed in the groove, the electrically conductive connecting post (12) both penetrating the fixed support cavity upper part (13), and electrically insulated from the fixed support cavity upper part (13); and a fixed support cavity lower part (14), closing the bottom part opening of the fixed support cavity upper part (13) and used to form a fixed support cavity, the MEMS electric field measuring module (3) being disposed in the fixed support cavity, and being used to probe an external electric field by means of the electrically conductive connecting post (12) and the electrically conductive curved-top rainproof housing (11).