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1. (WO2018218373) METHOD OF PATTERNED DEPOSITION EMPLOYING PRESSURIZED FLUIDS AND THERMAL GRADIENTS

Pub. No.:    WO/2018/218373    International Application No.:    PCT/CA2018/050663
Publication Date: Fri Dec 07 00:59:59 CET 2018 International Filing Date: Sat Jun 02 01:59:59 CEST 2018
IPC: H01L 21/20
B05B 12/16
B05D 1/32
B05D 3/06
H01L 21/288
C09D 5/24
Applicants: SIMON FRASER UNIVERSITY
Inventors: KAAKE, Loren Gregory
Title: METHOD OF PATTERNED DEPOSITION EMPLOYING PRESSURIZED FLUIDS AND THERMAL GRADIENTS
Abstract:
A method of depositing a lateral pattern of a deposition material onto a substrate. The method comprises fabricating a laterally patterned deposition surface on the substrate having one or more deposition regions and one or more non-deposition regions. The method comprises depositing deposition material onto the deposition regions of the deposition surface to form a deposition structure comprising deposited regions and non- deposited regions. Depositing deposition material comprises dissolving the deposition material in a solvent to form a solution, introducing the deposition surface into fluid contact with the solution, varying a temperature of the solution, varying a pressure of the solution; and selectively heating the deposition regions to temperatures greater than the temperature of the solution to cause the deposition material to precipitate from the solution and deposit onto the deposition regions.