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1. (WO2018205531) MASK PLATE AND MASK PIECES

Pub. No.:    WO/2018/205531    International Application No.:    PCT/CN2017/110803
Publication Date: Fri Nov 16 00:59:59 CET 2018 International Filing Date: Wed Nov 15 00:59:59 CET 2017
IPC: C23C 14/04
C23C 14/24
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
京东方科技集团股份有限公司
ORDOS YUANSHENG OPTOELECTRONICS CO., LTD.
鄂尔多斯市源盛光电有限责任公司
Inventors: JIN, Long
金龙
TANG, Fuqiang
唐富强
HUANG, Chun Chieh
黄俊杰
JING, Yu
井昱
Title: MASK PLATE AND MASK PIECES
Abstract:
Disclosed are a mask plate and mask pieces. The mask plate comprises a first mask piece (100) and a second mask piece (200), wherein the first mask piece (100) comprises a first mask region (110) located in the middle in a first direction and a first peripheral region (120) located on two sides thereof, with the thickness of the first mask region (110) being less than the thickness of the first peripheral region (120), so as to form a first recessed portion (1120); and the second mask piece (200) comprises a second mask region (210) located in the middle in a second direction and a second peripheral region (220) located on two sides, with the thickness of the second mask region (210) being less than the thickness of the second peripheral region (220), so as to form a second recessed portion (2120). In the mask plate, the surface of the first mask region (110) facing the first recessed portion (1120) is fitted with the surface of the second mask region (210) facing the second recessed portion (2120), so as to make the two mask pieces be more closely fitted together to thereby effectively enhance the welding accuracy and increase the production yield. In addition, the reduction in the thickness of the mask region can enhance the vapor deposition yield.