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1. (WO2018205450) THIN FILM TRANSISTOR, ARRAY SUBSTRATE, DISPLAY APPARATUS, AND METHOD OF FABRICATING THIN FILM TRANSISTOR

Pub. No.:    WO/2018/205450    International Application No.:    PCT/CN2017/098827
Publication Date: Fri Nov 16 00:59:59 CET 2018 International Filing Date: Fri Aug 25 01:59:59 CEST 2017
IPC: H01L 29/786
Applicants: BOE TECHNOLOGY GROUP CO., LTD.
CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Inventors: HUANG, Zhonghao
ZHAO, Yongliang
WANG, Jun
YANG, Yutong
SHI, Jianfei
HE, Baosheng
WU, Xu
Title: THIN FILM TRANSISTOR, ARRAY SUBSTRATE, DISPLAY APPARATUS, AND METHOD OF FABRICATING THIN FILM TRANSISTOR
Abstract:
A thin film transistor includes a base substrate (19); an active layer (11); an etch stop layer (12) on a side of the active layer (11) distal to the base substrate (19); and a source electrode (13) and a drain electrode (14) on a side of the etch stop layer (12) distal to the active layer (11). The active layer (11) includes a channel region (100), a source electrode contact region (200), and a drain electrode contact region (300). An orthographic projection (12p) of the etch stop layer (12) on the base substrate (19) surrounds an orthographic projection (300p) of the drain electrode contact region (300) on the base substrate (19). An orthographic projection (200p) of the source electrode contact region (200) on the base substrate (19) at least partially peripherally surrounding the orthographic projection (12p) of the etch stop layer (12) on the base substrate (19).