Search International and National Patent Collections

1. (WO2018205432) EVAPORATION DEVICE

Pub. No.:    WO/2018/205432    International Application No.:    PCT/CN2017/096369
Publication Date: Fri Nov 16 00:59:59 CET 2018 International Filing Date: Wed Aug 09 01:59:59 CEST 2017
IPC: C23C 14/24
Applicants: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD
武汉华星光电技术有限公司
Inventors: MU, Junying
沐俊应
Title: EVAPORATION DEVICE
Abstract:
Provided is an evaporation device, comprising: a housing (202), and a plurality of evaporation sources (101, 203), which are located inside said housing (202) and used for evaporating a material to produce a gas material; the evaporation sources (101, 203) comprise: a material chamber, used for placing a material; a heating element, affixed to the exterior of the material chamber and used for heating the material inside the material chamber; nozzles (103, 204), located on the upper side of the evaporation sources (101, 203) and used for spraying the gas material onto the surface of a substrate (201); limit plates (102, 207), arranged on the two sides of the evaporation sources (101, 203); the height of the limit plates (102, 207) exceeds the nozzles (103, 204); the distance between adjacent limit plates (102, 207) is different from the height, and is used for limiting the range of material-spraying of the nozzles (103, 204) between two limit plates (102, 207); the limit plates (102, 207) are connected to a mobile assembly; by means of the mobile assembly, the limit plates (102, 207) are capable of moving between the areas of two evaporation sources (101, 203), and are used for adjusting the range of material-spraying of the nozzles (103, 204).