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1. (WO2018204963) METHOD FOR PRODUCING NOBLE METAL-MODIFIED SILICON NANOWIRES
Latest bibliographic data on file with the International Bureau    Submit observation

Pub. No.: WO/2018/204963 International Application No.: PCT/AT2018/060091
Publication Date: 15.11.2018 International Filing Date: 11.05.2018
IPC:
G01N 21/65 (2006.01) ,C23C 14/00 (2006.01) ,C23C 14/06 (2006.01) ,B82Y 40/00 (2011.01) ,B82Y 15/00 (2011.01) ,C23C 14/20 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
21
Investigating or analysing materials by the use of optical means, i.e. using infra-red, visible, or ultra-violet light
62
Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
63
optically excited
65
Raman scattering
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
40
Manufacture or treatment of nano-structures
B PERFORMING OPERATIONS; TRANSPORTING
82
NANO-TECHNOLOGY
Y
SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE  OR TREATMENT OF NANO-STRUCTURES
15
Nano-technology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
C CHEMISTRY; METALLURGY
23
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
C
COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
14
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
06
characterised by the coating material
14
Metallic material, boron or silicon
20
on organic substrates
Applicants:
TECHNISCHE UNIVERSITÄT WIEN [AT/AT]; Karlsplatz 13 1040 Wien, AT
Inventors:
MÜLLER, Danny; AT
KNOLL, Christian; AT
WEINBERGER, Peter; AT
OFNER, Johannes; AT
BITTNER, Roland; AT
LENDL, Bernhard; AT
HOFFMANN, Helmuth; AT
Agent:
ELLMEYER, Wolfgang; AT
Priority Data:
A 195/201711.05.2017AT
Title (EN) METHOD FOR PRODUCING NOBLE METAL-MODIFIED SILICON NANOWIRES
(FR) PROCÉDÉ POUR LA FABRICATION DE NANOFILS DE SILICIUM MODIFIÉS PAR DES MÉTAUX PRÉCIEUX
(DE) VERFAHREN ZUR HERSTELLUNG EDELMETALLMODIFIZIERTER SILICIUM-NANOWIRES
Abstract:
(EN) The invention relates to a method for producing noble metal-modified silicon nanowires, comprising the following steps: creating the silicon nanowires in a silicon wafer by means of silver-catalysed chemical wet etching; and applying one or more noble metals to the surface of the nanowires, characterised in that silicon nanowires coated with gold are produced by a) first creating the silicon nanowires in the silicon wafer by means of silver-catalysed chemical wet etching with an etching solution, wherein the concentration and the dwell time of the etching solution are coordinated with each other such that nanowires with a length < 15 μm are formed; and b) then coating the created nanowires with gold as the noble metal by sputtering, wherein the duration of the sputter coating is selected such that a gold coat with a thickness between 20 and 130 nm is formed.
(FR) L'invention concerne un procédé pour la fabrication de nanofils de silicium modifiés par des métaux précieux, comprenant une étape de production des nanofils de silicium dans une plaquette de silicium par gravure humide chimique catalysée par l'argent, ainsi qu'une étape de dépôt d'un ou plusieurs métaux précieux sur la surface du nanofil, caractérisé en ce que des nanofils de silicium recouverts d'or sont fabriqués, en ce que a) les nanofils de silicium sont d'abord produits par gravure humide chimique catalysée par l'argent avec une solution de gravure, la concentration et la durée d'action de la solution de gravure sont coordonnées de telle façon que les nanofils sont formés avec une longueur < 15 μm; et b) les nanofils obtenus sont ensuite recouverts par pulvérisation cathodique d'or, comme métal précieux, la durée du revêtement par pulvérisation cathodique étant choisie de telle façon qu'une couche d'or d'une épaisseur comprise entre 20 et 130 nm est formée.
(DE) Die Erfindung betrifft ein Verfahren zur Herstellung von edelmetallmodifizierten Silicium-Nanowires, umfassend einen Schritt des Erzeugens der Silicium-Nanowires in einem Siliciumwafer durch silberkatalysiertes chemisches Nassätzen sowie einen Schritt des Aufbringens eines oder mehrerer Edelmetalle auf die Oberfläche der Nanowires, dadurch gekennzeichnet, dass mit Gold beschichtete Silicium-Nanowires hergestellt werden, indem a) zunächst die Silicium-Nanowires im Siliciumwafer durch silberkatalysiertes chemisches Nassätzen mit einer Ätzlösung erzeugt werden, wobei die Konzentration und die Einwirkdauer der Ätzlösung so aufeinander abgestimmt werden, dass Nanowires mit einer Länge < 15 μm gebildet werden; und b) anschließend die erhaltenen Nanowires mit Gold als Edelmetall durch Sputtern beschichtet werden, wobei die Dauer der Sputterbeschichtung so gewählt wird, dass eine Goldschicht mit einer Dicke zwischen 20 und 130 nm gebildet wird.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: German (DE)
Filing Language: German (DE)