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1. (WO2018204923) METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS

Pub. No.:    WO/2018/204923    International Application No.:    PCT/US2018/031422
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Tue May 08 01:59:59 CEST 2018
IPC: G05B 23/02
Applicants: BROOKS AUTOMATION, INC.
Inventors: GAWLIK, Aaron
MOURA, Jairo, T.
Title: METHOD AND APPARATUS FOR HEALTH ASSESSMENT OF A TRANSPORT APPARATUS
Abstract:
A method for health assessment of a system including a transport apparatus including registering predetermined operating data embodying at least one dynamic performance variable output by the transport apparatus, determining a base value (CpkBase) characterized by a probability density function of each of the dynamic performance variable output, resolving from the transport apparatus in situ process motion commands of the apparatus controller and defining another predetermined motion set of the transport apparatus, registering predetermined operating data embodying the at least one dynamic performance variable output by the transport apparatus and determining with the processor another value (CpkOther) characterized by the probability density function of each of the dynamic performance variable output by the transport apparatus, and comparing the other value and the base value (CpkBase) for each of the dynamic performance variable output by the transport apparatus respectively corresponding to the predetermined motion base set and the other predetermined motion set.