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1. (WO2018204570) FLEXIBLE ADJUSTABLE RETURN PATH MAGNET ASSEMBLY AND METHODS

Pub. No.:    WO/2018/204570    International Application No.:    PCT/US2018/030778
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Fri May 04 01:59:59 CEST 2018
IPC: H01J 37/34
C23C 14/35
Applicants: CARDINAL CG COMPANY
Inventors: HARTIG, Klaus, H.W.
Title: FLEXIBLE ADJUSTABLE RETURN PATH MAGNET ASSEMBLY AND METHODS
Abstract:
The invention provides a sputter deposition assembly that includes a sputtering chamber, a sputtering target, and a magnet assembly. The magnet assembly includes a magnetic backing plate comprising an elongated flexible magnetic control body or a plurality of layered metal sheets.