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|1. (WO2018204545) METHOD FOR RAPID TEMPERATURE MEASUREMENT AND APPARATUS THEREOF|
|Applicants:||NINGBO INFINITE MATERIALS TECHNOLOGY CO., LTD
|Title:||METHOD FOR RAPID TEMPERATURE MEASUREMENT AND APPARATUS THEREOF|
Method and apparatus for rapid temperature measurement in a small sample area. Using a standard thermometer and spectrometer or ellipsometry, the relationship between temperature and the optical constants of materials such as the reflectivity at plasma frequency or the imaginary part of dielectric constant is determined. By measuring the optical constants of a material during rapid temperature change (such as during material processing) using a spectrometer or ellipsometry, the temperature of the material during rapid thermal processing can be determined based on the above relationship in nanoseconds.