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1. (WO2018204545) METHOD FOR RAPID TEMPERATURE MEASUREMENT AND APPARATUS THEREOF

Pub. No.:    WO/2018/204545    International Application No.:    PCT/US2018/030738
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Thu May 03 01:59:59 CEST 2018
IPC: G01K 11/12
G01K 11/14
G01K 11/16
G01K 11/18
G01N 21/17
G01N 21/21
G02B 5/30
G01B 11/02
Applicants: NINGBO INFINITE MATERIALS TECHNOLOGY CO., LTD
XIANG, Xiao-Dong
Inventors: XIANG, Xiao-Dong
WANG, Xiao-Ping
WANG, Hong
Title: METHOD FOR RAPID TEMPERATURE MEASUREMENT AND APPARATUS THEREOF
Abstract:
Method and apparatus for rapid temperature measurement in a small sample area. Using a standard thermometer and spectrometer or ellipsometry, the relationship between temperature and the optical constants of materials such as the reflectivity at plasma frequency or the imaginary part of dielectric constant is determined. By measuring the optical constants of a material during rapid temperature change (such as during material processing) using a spectrometer or ellipsometry, the temperature of the material during rapid thermal processing can be determined based on the above relationship in nanoseconds.