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1. (WO2018204109) IMAGE BASED SUBSTRATE MAPPER

Pub. No.:    WO/2018/204109    International Application No.:    PCT/US2018/028825
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Tue Apr 24 01:59:59 CEST 2018
IPC: H01L 21/67
H01L 21/66
H01L 21/677
Applicants: APPLIED MATERIALS, INC.
Inventors: PEH, Eng Sheng
BALAKRISHNAN, Karthik
THIRUNAVUKARASU, Sriskantharajah
Title: IMAGE BASED SUBSTRATE MAPPER
Abstract:
Methods and apparatus for detecting warpage in a substrate are provided herein. In some embodiments, a warpage detector for detecting warpage in substrates includes: one or more light sources to illuminate one or more substrates when present; a camera for capturing images of exposed portions of one or more substrates when present; a motion assembly having a mounting stage for supporting the camera; and a data acquisition interface (DAI) coupled to the camera to process substrate images and detect warpage of substrates based upon the processed substrate images.