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1. (WO2018203448) WORKPIECE CUTTING METHOD AND JOINING MEMBER

Pub. No.:    WO/2018/203448    International Application No.:    PCT/JP2018/010922
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Wed Mar 21 00:59:59 CET 2018
IPC: B24B 27/06
B24B 53/00
B28D 5/04
B28D 7/04
H01L 21/304
Applicants: SHIN-ETSU HANDOTAI CO.,LTD.
信越半導体株式会社
Inventors: TOYODA Shiro
豊田 史朗
Title: WORKPIECE CUTTING METHOD AND JOINING MEMBER
Abstract:
The present invention is a wire-saw-based workpiece cutting method in which a fixed abrasive particle wire, to the surface of which are bonded abrasive particles, is wrapped around a plurality of grooved rollers to form a wire array, and, while reciprocatingly running the fixed abrasive particle wire in the axial direction thereof, a workpiece held by a workpiece holding means via a joining member bonded to the workpiece is delivered toward and cut into by the wire array, thereby simultaneously cutting the workpiece at a plurality of locations along the axial direction thereof, wherein a joining member partially constituted by a grindstone is used so that, after the workpiece has finished being cut and before the workpiece is pulled away from the wire array, the fixed abrasive particle wire is abraded by the grindstone forming the joining member. As a result, a workpiece cutting method is provided that is capable of suppressing the formation of saw marks and the occurrence of wire breakage caused by the fixed abrasive particle wire catching on the workpiece when the wire is withdrawn after the workpiece has been cut.