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1. (WO2018202576) INKJET PRINTING PROCESS

Pub. No.:    WO/2018/202576    International Application No.:    PCT/EP2018/060879
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Sat Apr 28 01:59:59 CEST 2018
IPC: C09D 11/322
C09D 11/38
C09D 11/52
B81C 1/00
B82Y 40/00
H01L 41/00
Applicants: LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
Inventors: GODARD, Nicolas
SETTE, Daniele
GLINSEK, Sebastjan
DEFAY, Emmanuel
Title: INKJET PRINTING PROCESS
Abstract:
The invention is directed to an only inkjet-printing-based process for depositing functional materials, preferably PZT, on a substrate, preferably platinized silicon. Substrate templating (via SAMs) and material deposition are both performed by an inkjet printing process. The invention also relates to a composition to be used as a SAM precursor ink which is a thiol in a solvent mixture. The invention further concerns a cartridge for a printing machine with such a composition. The invention also relates to the use of such a cartridge, alone, or as a kit with another cartridge containing a precursor of the functional material, in particular to perform both steps of the printing method. The invention also relates to the product, for instance a microsystem, obtained by the process of the invention.