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|1. (WO2018202576) INKJET PRINTING PROCESS|
|Applicants:||LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
|Title:||INKJET PRINTING PROCESS|
The invention is directed to an only inkjet-printing-based process for depositing functional materials, preferably PZT, on a substrate, preferably platinized silicon. Substrate templating (via SAMs) and material deposition are both performed by an inkjet printing process. The invention also relates to a composition to be used as a SAM precursor ink which is a thiol in a solvent mixture. The invention further concerns a cartridge for a printing machine with such a composition. The invention also relates to the use of such a cartridge, alone, or as a kit with another cartridge containing a precursor of the functional material, in particular to perform both steps of the printing method. The invention also relates to the product, for instance a microsystem, obtained by the process of the invention.