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1. (WO2018202388) METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION

Pub. No.:    WO/2018/202388    International Application No.:    PCT/EP2018/059183
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Wed Apr 11 01:59:59 CEST 2018
IPC: G03F 7/20
Applicants: ASML NETHERLANDS B.V.
Inventors: JAVAHERI, Narjes
HAJIAHMADI, Mohammadreza
ZWIER, Olger, Victor
SANGUINETTI, Gonzalo, Roberto
Title: METROLOGY PARAMETER DETERMINATION AND METROLOGY RECIPE SELECTION
Abstract:
A method of determining a patterning process parameter from a metrology target, the method including: obtaining a plurality of values of diffraction radiation from the metrology target, each value of the plurality of values corresponding to a different illumination condition of a plurality of illumination conditions of illumination radiation for the target; and using the combination of values to determine a same value of the patterning process parameter for the target.