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1. (WO2018201542) OLED DISPLAY PANEL AND METHOD FOR MANUFACTURING SAME
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Pub. No.: WO/2018/201542 International Application No.: PCT/CN2017/086234
Publication Date: 08.11.2018 International Filing Date: 27.05.2017
IPC:
H01L 21/77 (2017.01) ,H01L 27/32 (2006.01)
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
70
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in or on a common substrate or of specific parts thereof; Manufacture of integrated circuit devices or of specific parts thereof
77
Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
27
Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
28
including components using organic materials as the active part, or using a combination of organic materials with other materials as the active part
32
with components specially adapted for light emission, e.g. flat-panel displays using organic light-emitting diodes
Applicants:
深圳市华星光电技术有限公司 SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD. [CN/CN]; 中国广东省深圳市 光明新区塘明大道9-2号 No. 9-2, Tangming Rd, Guangming New District Shenzhen, Guangdong 518132, CN
Inventors:
张晓星 ZHANG, Xiaoxing; CN
徐源竣 HSU, Yuan-jun; CN
Agent:
深圳市威世博知识产权代理事务所 (普通合伙) CHINA WISPRO INTELLECTUAL PROPERTY LLP.; 中国广东省深圳市 南山区高新区粤兴三道8号中国地质大学产学研基地中地大楼A806 Room A806 Zhongdi Building China University of Geosciences Base, No. 8 Yuexing 3rd Road, High-Tech Industrial Estate, Nanshan District Shenzhen, Guangdong 518057, CN
Priority Data:
201710302087.102.05.2017CN
Title (EN) OLED DISPLAY PANEL AND METHOD FOR MANUFACTURING SAME
(FR) PANNEAU D'AFFICHAGE OLED ET SON PROCÉDÉ DE FABRICATION
(ZH) 一种OLED显示面板及其制备方法
Abstract:
(EN) Provided in the present invention are an OLED display panel and a method for manufacturing the same. According to the method, the present invention utilizes the characteristic of a silicon nitride having a high hydrogen content, such that a part of a semiconductor oxide pattern layer contacting a silicon nitride layer and having conductive properties can remain doped with hydrogen atoms and so maintain the conductive properties thereof. In this way, contact resistance between the part of the semiconductor oxide pattern layer and source and drain electrodes can remain low, thereby achieving a TFT function.
(FR) La présente invention concerne un panneau d'affichage OLED et son procédé de fabrication. Selon le procédé, la présente invention utilise la caractéristique d'un nitrure de silicium ayant une teneur élevée en hydrogène, de telle sorte qu'une partie d'une couche de motif d'oxyde semi-conducteur en contact avec une couche de nitrure de silicium et ayant des propriétés conductrices puisse rester dopée par des atomes d'hydrogène et maintenir leurs propriétés conductrices. De cette manière, la résistance de contact entre la partie de la couche de motif d'oxyde semi-conducteur et les électrodes de source et de drain peut rester faible, ce qui permet d'obtenir une fonction TFT.
(ZH) 本发明提供了一种OLED显示面板及其制备方法,通过这种方法,本发明利用氮化硅中含氢较多的特点,使得与氮化硅层接触的具有导体特性的部分半导体氧化物图案层能够持续的掺杂有氢原子而保持导体特性,进而使得该部分半导体氧化物图案层与源极和漏极的接触阻抗能够持续的保持在较低的状态,以实现TFT功能。
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: Chinese (ZH)
Filing Language: Chinese (ZH)