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1. (WO2018201529) DRY ETCHING EQUIPMENT AND DRY ETCHING EQUIPMENT ELECTRODE

Pub. No.:    WO/2018/201529    International Application No.:    PCT/CN2017/085154
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Sat May 20 01:59:59 CEST 2017
IPC: H01J 37/32
Applicants: HKC CORPORATION LIMITED
惠科股份有限公司
CHONGQING HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
重庆惠科金渝光电科技有限公司
Inventors: WEN, Chun-Bin
温俊斌
Title: DRY ETCHING EQUIPMENT AND DRY ETCHING EQUIPMENT ELECTRODE
Abstract:
The invention discloses dry etching equipment (100) and an electrode of the dry etching equipment. The electrode of the dry etching equipment comprises: an electrode plate (121), a stop ring (113) and a partition board (114). A component placing area (123) and an edge area surrounding the component placing area (124) are arranged on the surface of the electrode plate. The stop ring (113) is arranged in the edge area (124) and is arranged at the periphery of the component placing area (123). The partition board (114) is arranged at the outer side of the electrode board (121), is adjacent to the periphery of the stop ring (113) and is provided with a plurality of perforations (125).