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1. (WO2018201471) MEMS MICROPHONE

Pub. No.:    WO/2018/201471    International Application No.:    PCT/CN2017/083306
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Sat May 06 01:59:59 CEST 2017
IPC: H04R 19/04
H04R 1/08
Applicants: GOERTEK INC.
Inventors: ZOU, Quanbo
YAN, Jiangliang
A MEMS microphone, comprising a packaging structure that is enveloped by a PCB substrate (1) and a housing (2), wherein the packaging structure is provided with a MEMS acoustoelectric chip (3) therein, and the PCB substrate (1) is provided with a sound port (11) at a position that is corresponding to the MEMS acoustoelectric chip (3), wherein, the MEMS microphone further comprises a filter (5), wherein the filter (5) is embedded into a back cavity of the MEMS acoustoelectric chip (3), the filter (5) and the PCB substrate (1) have a lateral hole therebetween, and the lateral hole serves as a sound channel that is used by the MEMS acoustoelectric chip (3)to gather sound. The MEMS microphone can prevent gas shock, block the interfering to the MEMS microphone by kinetic particles, keep the acoustic performance of the MEMS microphone, and reduce the packaging size of the MEMS microphone.