Search International and National Patent Collections

1. (WO2018201170) METHOD FOR CALIBRATING A HETERODYNE ELECTROSTATIC FORCE MICROSCOPE

Pub. No.:    WO/2018/201170    International Application No.:    PCT/AT2018/050008
Publication Date: Fri Nov 09 00:59:59 CET 2018 International Filing Date: Thu May 03 01:59:59 CEST 2018
IPC: G01Q 40/00
G01Q 60/46
Applicants: UNIVERSITÄT LINZ
Inventors: GRAMSE, Georg
Title: METHOD FOR CALIBRATING A HETERODYNE ELECTROSTATIC FORCE MICROSCOPE
Abstract:
The invention relates to a method for calibrating a heterodyne electrostatic force microscope having a sample receptacle (1) and a measuring probe (3) which lies opposite the sample receptacle (1) and to which an amplitude-modulated, high-frequency alternating voltage is applied, wherein the oscillations of the measuring probe (3) are detected by a laser detector (9), and the output signal thereof is supplied to a lock-in amplifier (10) for providing a signal component which is dependent on the capacitance gradient between the sample (2) and the measuring probe (3). To create simple calibration conditions, the amplitude of the signal component dependent on the capacitance gradient between the sample (2) and the measuring probe (3) is regulated to a constant value by controlling the amplitude of the high-frequency alternating voltage of the signal generator (6).