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1. (WO2018200920) GLASS ELECTROCHEMICAL SENSOR WITH WAFER LEVEL STACKING AND THROUGH GLASS VIA (TGV) INTERCONNECTS
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Pub. No.: WO/2018/200920 International Application No.: PCT/US2018/029732
Publication Date: 01.11.2018 International Filing Date: 27.04.2018
IPC:
G01N 27/404 (2006.01) ,G01N 27/406 (2006.01) ,H01L 21/00 (2006.01)
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27
Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26
by investigating electrochemical variables; by using electrolysis or electrophoresis
403
Cells and electrode assemblies
404
Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid
G PHYSICS
01
MEASURING; TESTING
N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
27
Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
26
by investigating electrochemical variables; by using electrolysis or electrophoresis
403
Cells and electrode assemblies
406
Cells and probes with solid electrolytes
H ELECTRICITY
01
BASIC ELECTRIC ELEMENTS
L
SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
21
Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Applicants:
BELLMAN, Robert Alan [US/US]; US
KING, Jeffrey Stapleton [US/US]; US
POLLARD, Scott Christopher [US/US]; US
CORNING INCORPORATED [US/US]; 1 Riverfront Plaza Corning, New York 14831, US
Inventors:
BELLMAN, Robert Alan; US
KING, Jeffrey Stapleton; US
POLLARD, Scott Christopher; US
Agent:
MAGAZINER, Russell S; US
Priority Data:
62/491,40828.04.2017US
Title (EN) GLASS ELECTROCHEMICAL SENSOR WITH WAFER LEVEL STACKING AND THROUGH GLASS VIA (TGV) INTERCONNECTS
(FR) CAPTEUR ÉLECTROCHIMIQUE EN VERRE AVEC EMPILEMENT DE NIVEAU DE TRANCHE ET INTERCONNEXIONS DE TROU D'INTERCONNEXION TRAVERSANT EN VERRE (TGV)
Abstract:
(EN) A method of forming a glass electrochemical sensor is described. In some embodiments, the method may include forming a plurality of electrical through glass vias (TGVs) in an electrode substrate; filling each of the plurality of electrical TGVs with an electrode material; forming a plurality of contact TGVs in the electrode substrate; filling each of the plurality of contact TGVs with a conductive material; patterning the conductive material to connect the electrical TGVs with the contact TGVs; forming a cavity in a first glass layer; and bonding a first side of the first glass layer to the electrode substrate.
(FR) La présente invention concerne un procédé de formation d'un capteur électrochimique en verre. Dans certains modes de réalisation, le procédé peut comprendre la formation d'une pluralité de trous d'interconnexion traversants en verre (TGV) électriques dans un substrat d'électrode ; le remplissage de chaque TGV électrique par un matériau d'électrode ; la formation d'une pluralité de TGV de contact dans le substrat d'électrode ; le remplissage de chaque pluralité de TGV de contact par un matériau conducteur ; la formation de motif sur le matériau conducteur de manière à connecter les TGV électriques aux TGV de contact ; la formation d'une cavité dans une première couche de verre ; et la liaison d'un premier côté de la première couche de verre au substrat d'électrode.
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Designated States: AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
African Regional Intellectual Property Organization (ARIPO) (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW)
Eurasian Patent Office (AM, AZ, BY, KG, KZ, RU, TJ, TM)
European Patent Office (EPO) (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR)
African Intellectual Property Organization (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG)
Publication Language: English (EN)
Filing Language: English (EN)