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1. (WO2018200408) GAS SENSORS INCLUDING MICROHOTPLATES WITH RESISTIVE HEATERS, AND RELATED METHODS

Pub. No.:    WO/2018/200408    International Application No.:    PCT/US2018/028935
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Tue Apr 24 01:59:59 CEST 2018
IPC: G01N 27/16
H05B 3/14
H05B 3/26
Applicants: NEVADA NANOTECH SYSTEMS INC.
Inventors: ROGERS, Ben
DUDLEY, Christopher J.
HOPKINS, Dean A.
GEIGER, Emil J.
Title: GAS SENSORS INCLUDING MICROHOTPLATES WITH RESISTIVE HEATERS, AND RELATED METHODS
Abstract:
A microhotplate comprising a membrane suspended over a substrate by a plurality of tethers connected between the substrate and the membrane. The membrane comprises a resistive heater comprising an electrically conductive material having a varying width from a peripheral portion of the membrane to a center of the membrane. The electrically conductive material comprises a first portion spiraling in a first direction and a second portion spiraling in a second direction and in electrical communication with the first portion at the center of the membrane. The microhotplate further comprises a first electrically conductive trace extending over a first tether and in electrical contact with a bond pad on the substrate and the first portion and a second electrically conductive trace extending over another tether and in electrical contact with another bond pad on the substrate and the second portion. Related chemical sensors and related methods of detecting at least one analyte are also disclosed.