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1. (WO2018200404) PLASMA REACTOR WITH ELECTRODE FILAMENTS

Pub. No.:    WO/2018/200404    International Application No.:    PCT/US2018/028930
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Tue Apr 24 01:59:59 CEST 2018
IPC: H01J 37/32
Applicants: APPLIED MATERIALS, INC.
Inventors: COLLINS, Kenneth S.
RICE, Michael R.
RAMASWAMY, Kartik
CARDUCCI, James D.
Title: PLASMA REACTOR WITH ELECTRODE FILAMENTS
Abstract:
A plasma reactor includes a chamber body having an interior space that provides a plasma chamber and having a ceiling, a gas distributor to deliver a processing gas to the plasma chamber, a pump coupled to the plasma chamber to evacuate the chamber, a workpiece support to hold a workpiece facing the ceiling, an intra-chamber electrode assembly that includes an insulating frame and a filament extending laterally through the plasma chamber between the ceiling and the workpiece support, the filament including a conductor at least partially surrounded by an insulating shell that extends from the insulating frame, and a first RF power source to supply a first RF power to the conductor of the intra-chamber electrode assembly.