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|1. (WO2018200165) CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY|
|Applicants:||AXUS TECHNOLOGY, LLC
|Inventors:||TROJAN, Daniel Ray
|Title:||CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY|
An apparatus for performing chemical mechanical planarization is disclosed. The apparatus includes a support, wherein an axis of rotation extends through the support. The apparatus includes at least one elongated member including a first portion and a second portion opposed to the first portion. The first portion is configured to rotatably connect to the support and pivot the elongated member about the axis of rotation relative to the support through an angle of rotation that is at least about 270 degrees in a single direction. The apparatus includes a carrier head configured to connect to the second portion and to hold and process a substrate.