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1. (WO2018200165) CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY

Pub. No.:    WO/2018/200165    International Application No.:    PCT/US2018/026590
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 07 01:59:59 CEST 2018
IPC: H01L 21/673
H01L 21/677
H01L 21/683
H01L 21/68
B24B 37/10
B24B 37/27
B24B 37/34
B24B 41/00
B24B 7/22
Applicants: AXUS TECHNOLOGY, LLC
Inventors: TROJAN, Daniel Ray
Title: CMP MACHINE WITH IMPROVED THROUGHPUT AND PROCESS FLEXIBILITY
Abstract:
An apparatus for performing chemical mechanical planarization is disclosed. The apparatus includes a support, wherein an axis of rotation extends through the support. The apparatus includes at least one elongated member including a first portion and a second portion opposed to the first portion. The first portion is configured to rotatably connect to the support and pivot the elongated member about the axis of rotation relative to the support through an angle of rotation that is at least about 270 degrees in a single direction. The apparatus includes a carrier head configured to connect to the second portion and to hold and process a substrate.