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1. (WO2018200139) IMPROVED LASER LIGHT ENERGY AND DOSE CONTROL USING REPETITION RATE BASED GAIN ESTIMATORS

Pub. No.:    WO/2018/200139    International Application No.:    PCT/US2018/025921
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Wed Apr 04 01:59:59 CEST 2018
IPC: G03F 7/23
H01S 3/10
H01S 3/13
Applicants: CYMER, LLC
Inventors: ZHAO, Yingbo
O'BRIEN, Kevin Michael
Title: IMPROVED LASER LIGHT ENERGY AND DOSE CONTROL USING REPETITION RATE BASED GAIN ESTIMATORS
Abstract:
A laser system's laser light energy control and resulting dose control is improved by creating and using a set of gain estimators, one for each of a set or range of laser Sight pulse repetition rates. When a new repetition rate is used, its corresponding gain estimator is retrieved, used to compute the voltage to fire the Iaser source, and updated. The resulting generated Iaser light thereby avoids the convergence delay inherent in prior iaser systems and, further, can repeatedly do so with subsequent specified repetition rates.