Search International and National Patent Collections

1. (WO2018200071) INTERDIGITATING VERTICAL DAMPERS FOR MEMS-BASED ACTUATORS

Pub. No.:    WO/2018/200071    International Application No.:    PCT/US2018/019740
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Tue Feb 27 00:59:59 CET 2018
IPC: G02B 6/35
G02B 26/08
Applicants: GOOGLE LLC
Inventors: YASUMURA, Kevin Y.
Title: INTERDIGITATING VERTICAL DAMPERS FOR MEMS-BASED ACTUATORS
Abstract:
A microelectromechanical system (MEMS) mirror assembly includes a base substrate defining a cavity and a plurality of first features extending upwards from a bottom of the cavity. The MEMS mirror assembly includes a mirror substrate coupled to the base substrate and defining a MEMS actuator and a MEMS mirror platform. Actuation of the MEMS actuator moves the MEMS mirror platform from a first positional state to a second positional state. The MEMS mirror platform defines a plurality of second features on a side of the MEMS mirror platform facing the base substrate that are sized, shaped, and positioned such that the plurality of second features extend into spaces separating the plurality of first features when the mirror platform is in the second positional state. The MEMS mirror assembly includes a reflective material disposed on a side of the MEMS mirror platform facing away from the base substrate.