Search International and National Patent Collections

1. (WO2018199169) FILM FORMING DEVICE AND FILM FORMING METHOD

Pub. No.:    WO/2018/199169    International Application No.:    PCT/JP2018/016817
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Thu Apr 26 01:59:59 CEST 2018
IPC: C23C 14/24
C23C 14/56
Applicants: ULVAC, INC.
株式会社アルバック
Inventors: YOKOYAMA, Akihiro
横山 礼寛
TAKEI, Masaki
武井 応樹
SATO, Masatoshi
佐藤 昌敏
KIYOTA, Junya
清田 淳也
Title: FILM FORMING DEVICE AND FILM FORMING METHOD
Abstract:
A film forming device according to an aspect of the present invention has an unwinding roller, a winding roller, a heating roller, a film forming unit, and a control unit. The unwinding roller unwinds a base material which is a long film. The winding roller winds the base material unwound from the unwinding roller. The heating roller includes a hot bath unit, and is provided between the unwinding roller and the winding roller in the transporting direction of the base material and heats the base material. The film forming unit is provided facing the heating roller, includes an evaporation source having a heating mechanism for heating a metal material, and forms a metal film on the base material. While the base material is being unwound from the heating roller and wound around the winding roller, the control unit controls either the hot bath unit or the heating mechanism so that the temperature difference between the metal film and the base material is greater than 0°C and less than 180°C.