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1. (WO2018198952) FILTER DEVICE AND METHOD FOR MANUFACTURING SAME

Pub. No.:    WO/2018/198952    International Application No.:    PCT/JP2018/016242
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 21 01:59:59 CEST 2018
IPC: H03H 9/25
H03H 3/08
H03H 9/145
Applicants: MURATA MANUFACTURING CO., LTD.
株式会社村田製作所
Inventors: KAWASAKI, Koichiro
川崎 幸一郎
Title: FILTER DEVICE AND METHOD FOR MANUFACTURING SAME
Abstract:
A filter device (100), comprising: a piezoelectric substrate (1); first and second functional elements (S2, S3) disposed on the surface of the piezoelectric substrate (1); a first electroconductive layer (5c) disposed on the surface of the piezoelectric substrate (1), the first electroconductive layer (5c) connecting the first and second functional elements (S2, S3); an insulating layer (6) disposed at least on the first electroconductive layer (5c); a cover (2) disposed so as to face the surface of the piezoelectric substrate (1); a support layer (7) disposed between the surface of the piezoelectric substrate (1) and the cover (2), the support layer (7) forming a hollow part in which the first and second functional elements (S2, S3) are housed between the piezoelectric substrate (1) and the cover (2); and a first conductor (8c) for connecting the insulating layer (6) and the cover (2).