Search International and National Patent Collections

1. (WO2018198863) COATING TREATMENT DEVICE, COATING TREATMENT METHOD, AND OPTICAL FILM FORMATION DEVICE

Pub. No.:    WO/2018/198863    International Application No.:    PCT/JP2018/015741
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Tue Apr 17 01:59:59 CEST 2018
IPC: B05C 5/02
B05C 11/10
B05C 13/02
B05D 1/26
B05D 5/06
G02B 5/30
Applicants: TOKYO ELECTRON LIMITED
東京エレクトロン株式会社
Inventors: IKEMOTO, Daisuke
池本 大輔
Title: COATING TREATMENT DEVICE, COATING TREATMENT METHOD, AND OPTICAL FILM FORMATION DEVICE
Abstract:
A coating treatment device (10) comprises: substrate movement units (12, 13) that hold a substrate and move the substrate in the horizontal direction; an oblong coating nozzle (14) that extends in a direction orthogonal to the direction of movement of the substrate movement units, and discharges a coating liquid onto the substrate held by the substrate movement units; a coating nozzle movement unit (16) that moves the coating nozzle in the direction in which the coating nozzle extends; and a control unit (18) that controls the direction in which the substrate held by the substrate movement units is coated by controlling the movement speed of the substrate movement units and the coating nozzle movement unit.