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|1. (WO2018198723) ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD|
|Applicants:||NOMURA MICRO SCIENCE CO., LTD.
|Title:||ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD|
Provided is an ultrapure water production system equipped with a boron adsorption resin-mixed ion exchange resin, wherein high-quality ultrapure water having low concentrations of boron and TOC can be obtained for a long period of time. The ultrapure water production system produces ultrapure water by treating to-be-treated water containing a boron component and a total organic carbon component, and comprises, in order: a first ultraviolet oxidation device for irradiating the to-be-treated water with ultraviolet light at an ultraviolet irradiation dose 0.05-0.2 kWh/m3; a boron adsorption resin-mixed ion exchanger having a boron adsorption anion exchange mixed-bed resin obtained by mixing a boron adsorption resin and an anion exchange resin; a second ultraviolet oxidation device; and a non-regenerative mixed-bed ion exchange resin device.