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1. (WO2018198723) ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD

Pub. No.:    WO/2018/198723    International Application No.:    PCT/JP2018/014702
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 07 01:59:59 CEST 2018
IPC: C02F 1/42
B01J 39/05
B01J 39/20
B01J 41/05
B01J 41/14
C02F 1/32
C02F 1/44
C02F 9/12
Applicants: NOMURA MICRO SCIENCE CO., LTD.
野村マイクロ・サイエンス株式会社
Inventors: AMAYA Toru
天谷 徹
MARUYAMA Kazuo
丸山 和郎
Title: ULTRAPURE WATER PRODUCTION SYSTEM AND ULTRAPURE WATER PRODUCTION METHOD
Abstract:
Provided is an ultrapure water production system equipped with a boron adsorption resin-mixed ion exchange resin, wherein high-quality ultrapure water having low concentrations of boron and TOC can be obtained for a long period of time. The ultrapure water production system produces ultrapure water by treating to-be-treated water containing a boron component and a total organic carbon component, and comprises, in order: a first ultraviolet oxidation device for irradiating the to-be-treated water with ultraviolet light at an ultraviolet irradiation dose 0.05-0.2 kWh/m3; a boron adsorption resin-mixed ion exchanger having a boron adsorption anion exchange mixed-bed resin obtained by mixing a boron adsorption resin and an anion exchange resin; a second ultraviolet oxidation device; and a non-regenerative mixed-bed ion exchange resin device.