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1. (WO2018198311) VAPOR DEPOSITION MASK, VAPOR DEPOSITION DEVICE, AND METHOD FOR MANUFACTURING DISPLAY DEVICE

Pub. No.:    WO/2018/198311    International Application No.:    PCT/JP2017/016929
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Sat Apr 29 01:59:59 CEST 2017
IPC: C23C 16/04
G09F 9/00
H01L 27/32
H01L 51/50
H05B 33/10
Applicants: SHARP KABUSHIKI KAISHA
シャープ株式会社
Inventors: MIYAMOTO, Yoshinobu
宮本 恵信
HIRASE, Takeshi
平瀬 剛
SONODA, Tohru
園田 通
MATSUI, Akihiro
松井 章宏
OCHI, Hisao
越智 久雄
OCHI, Takashi
越智 貴志
SENOO, Tohru
妹尾 亨
TAKAHASHI, Jumpei
高橋 純平
Title: VAPOR DEPOSITION MASK, VAPOR DEPOSITION DEVICE, AND METHOD FOR MANUFACTURING DISPLAY DEVICE
Abstract:
The present invention has a sheet-like sheet part (13) whereon one or a plurality of mask opening parts (19) is formed, and first protruding parts (14) that constitute a surface opposite from a substrate (1a) on the sheet part (13) and have a frame shape formed along the edge of at least one of the mask opening parts (19) of the one or a plurality of mask opening parts (19). Thus, a thin film that is according to design dimensions and for which blurring is prevented is formed on the substrate.