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1. (WO2018198288) PUMP MONITORING DEVICE, VACUUM PROCESSING DEVICE, AND VACUUM PUMP

Pub. No.:    WO/2018/198288    International Application No.:    PCT/JP2017/016818
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Fri Apr 28 01:59:59 CEST 2017
IPC: F04B 49/10
F04D 19/04
Applicants: SHIMADZU CORPORATION
株式会社島津製作所
Inventors: TAMAI, Yusuke
玉井 雄介
NODA, Akira
野田 陽
Title: PUMP MONITORING DEVICE, VACUUM PROCESSING DEVICE, AND VACUUM PUMP
Abstract:
Provided is a pump monitoring device that detects abnormalities in a plurality of vacuum pumps which are connected to the same chamber. The pump monitoring device compares signals indicating the rotation state of the pump rotor of each of the plurality of vacuum pumps, and on the basis of such results, estimates if an abnormality is occurring in any the plurality of vacuum pumps.