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1. (WO2018198242) INSPECTION DEVICE, INSPECTION METHOD, AND METHOD FOR PRODUCING OBJECT TO BE INSPECTED

Pub. No.:    WO/2018/198242    International Application No.:    PCT/JP2017/016604
Publication Date: Fri Nov 02 00:59:59 CET 2018 International Filing Date: Thu Apr 27 01:59:59 CEST 2017
IPC: G01N 23/04
Applicants: NIKON CORPORATION
株式会社ニコン
Inventors: OHBAYASHI, Takeshi
大林 岳史
ZAIKE, Masayuki
在家 正行
MICHIMOTO, Takahiro
道本 隆裕
Title: INSPECTION DEVICE, INSPECTION METHOD, AND METHOD FOR PRODUCING OBJECT TO BE INSPECTED
Abstract:
This inspection device has a ray source for irradiating energy rays toward an object to be inspected, a detection unit for detecting energy rays that have passed through the object to be inspected, a displacement mechanism for setting the positional relationship between the object to be inspected and the ray source by displacing at least one from among the object to be inspected and the ray source in relation to the other, an internal image generation unit for generating an internal image of the object to be inspected on the basis of the distribution of energy ray amounts detected by the detection unit, and a control unit for controlling the displacement mechanism on the basis of the distribution of the energy ray amounts detected by the detection unit.